晶圓用CHUCK

應用 : 客製化設計

          (主要替換現有使用鋁製吸盤的使用者)

孔徑: 2um、5um、15um、30um

孔隙率: 35-60%

小孔徑: 可區域性吸附 切割/研磨盤/真空吸盤

大孔徑: 無區域性吸附 傳統切割/研磨盤/真空吸盤/氣浮載台

尺寸: 可客製化(目前製作案例從10x10mm ~ 1,500x1,850mm)

顏色: 黑/土黃/灰色

 

可吸附翹曲、鏤空工件、玻璃基板材料類型等作業物。

相較於傳統吸盤對於工件單一化規格吸附的特性,陶瓷真空吸盤的區域性吸附功能,

有助於提升產線流暢度及其效能,亦可避免傳統吸盤易造成的刮傷及吸痕。

 

Porous Ceramic Vacuum Chucks (Panel/Optoelectronic Industry)

Application: Customized design

(replacement for aluminum chucks)

Pore size: 2 µm, 5 µm, 15 µm, 30 µm

Porosity: 35-60%

Small pore sizes: Supports regional adhesion; suitable for cutters, grinding discs, and vacuum chucks

Large pore sizes: No support for regional adhesion; suitable for conventional cutters, grinding discs, vacuum chucks/air floating tables

Dimension: Customizable (dimensions between 10×10 mm and 1,500×1,850 mm have been shipped)

Color: Black, white, brown, gray

 

Our vacuum chucks are capable of holding warped/hollow workpieces and glass substrates.

Traditional chucks are typically manufactured to meet a single set of specifications. By comparison, our ceramic vacuum chucks offer regional adhesion. They are designed to enhance the continuity and efficiency of production lines while avoiding scratches and hold marks often produced by conventional chucks.